Simulating the Effect of Ar+ Energy Implantation on the Strain Propagation in Algan

AuthID
 P-00T-SB3
5
Author(s)
Cabaco, JS
·
Araujo, JP
·
Document Type
Article
Year published
2021
Published
in JOURNAL OF PHYSICS D-APPLIED PHYSICS, ISSN: 0022-3727
Volume: 54, Issue: 24
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Publication Identifiers
Wos: WOS:000635085600001
Source Identifiers
ISSN: 0022-3727
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