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The Influence of Argon Pressure and Rf Power on the Growth of Inp Thin Films
AuthID
P-002-PQX
3
Author(s)
Chandra, GH
·
Perez de la Cruz, JP
·
Ventura, J
Document Type
Article
Year published
2011
Published
in
SEMICONDUCTOR SCIENCE AND TECHNOLOGY,
ISSN: 0268-1242
Volume: 26, Issue: 7, Pages: 075017 (8)
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Wos
®
Scopus
®
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®
9
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Publication Identifiers
DOI
:
10.1088/0268-1242/26/7/075017
Scopus
: 2-s2.0-79956204484
Wos
: WOS:000289554400018
Source Identifiers
ISSN
: 0268-1242
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