Publications

AuthID
P-00V-3YY

Author(s)

Sompalle, B

Liao, CD

Wei, B

Cerqueira, MD

Nicoara, N

Wang, ZC

Sadewasser, S

Document Type

Article

Year published

2021

Published

in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101

Volume: 39, Issue: 4

Indexing

Wos^®

Scopus^®

Google Scholar^®

Publication Identifiers

DOI: 10.1116/6.0000987

Scopus: 2-s2.0-85108604423

Wos: WOS:000665103000001

Source Identifiers

ISSN: 0734-2101

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