Detailed Phisyco-Chemical Characterization of the Multilayered Thin Films Based on Titanium Oxynitride and Copper Doped Titanium Nitride Obtained by Different Pvd Techniques

AuthID
 P-00W-179
7
Author(s)
Jokanovic, V
·
Petrovic, B
·
Ferarra, M
·
Jokanovic, B
·
Zivkovic, S
·
Nasov, I
Document Type
Article
Year published
2022
Published
in VACUUM, ISSN: 0042-207X
Volume: 195
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Publication Identifiers
Wos: WOS:000733006900005
Source Identifiers
ISSN: 0042-207X
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