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Re-Orientation of Graphoepitaxial Fluorite Films Towards Small-Index Crystallographic Planes

AuthID
P-00W-83H

Author(s)

Mozhaev, PB

Bdikin, IK

Hansen, JB

Jacobsen, CS

Editor(s)

Rudenko,KV;Lukichev,VF

Document Type

Proceedings Paper

Year published

2022

Published

in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X

Volume: 12157

Conference

14Th International Conference on Micro- and Nano-Electronics 2021, Icmne 2021, Date: 4 October 2021 through 8 October 2021, Sponsors: JSC Molecular Electronics Research Institute;NIX Company;TechnoInfo Ltd.

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Publication Identifiers

DOI: 10.1117/12.2623743

Scopus: 2-s2.0-85125667440

Source Identifiers

ISSN: 0277-786X

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Re-Orientation of Graphoepitaxial Fluorite Films Towards Small-Index Crystallographic Planes

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