Hipims Pulse Shape Influence on the Deposition of Diamond-Like Carbon Films

AuthID
 P-00W-FD6
4
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Document Type
Article
Year published
2022
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 432
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Wos: WOS:000782669800004
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ISSN: 0257-8972
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