Surface Passivation of Iii-V Gaas Nanopillars by Low-Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices

AuthID
 P-00W-TSW
6
Author(s)
Jacob, B
·
Camarneiro, F
·
Nieder, JB
·
Borme, J
Document Type
Article in Press
Year published
2022
Published
in ACS APPLIED ELECTRONIC MATERIALS, ISSN: 2637-6113
Indexing
Wos®
Scopus®
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Publication Identifiers
Scopus: 2-s2.0-85134810711
Wos: WOS:000824313800001
Source Identifiers
ISSN: 2637-6113
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