Flexible Multifunctional Hard Coatings Based on Chromium Oxynitride for Pressure-Sensing Applications

AuthID
 P-00X-EZX
4
Author(s)
Correa, MA
·
Document Type
Article
Year published
2022
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 40, Issue: 6
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Publication Identifiers
Scopus: 2-s2.0-85141210877
Wos: WOS:000876553700002
Source Identifiers
ISSN: 0734-2101
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