Shape and Thickness Measurements Using a Reconstruction Method for Linear Sensor Microscopy Based on Improvement of Lateral Resolution Isotropy

AuthID
 P-002-Z9A
2
Author(s)
3
Editor(s)
Lehmann, PH; Osten, W; Gastinger, K
Document Type
Proceedings Paper
Year published
2011
Published
in OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII in Proceedings of SPIE, ISSN: 0277-786X
Volume: 8082
Conference
Conference on Optical Measurement Systems for Industrial Inspection Vii, Date: MAY 23-26, 2011, Location: Munich, GERMANY, Sponsors: SPIE
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Publication Identifiers
Scopus: 2-s2.0-84861040331
Wos: WOS:000295076900111
Source Identifiers
ISSN: 0277-786X
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