Modelling the Strain Build-Up in Nitrogen Implanted Tungsten Films on Silicon Substrates

AuthID
 P-00Y-GAK
6
Author(s)
Pompilian, OG
·
Document Type
Article
Year published
2023
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 537, Pages: 81-87 (7)
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Publication Identifiers
Wos: WOS:000995055600001
Source Identifiers
ISSN: 0168-583X
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