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TITLE: Deep, vertical etching of hi-silica films for optical waveguide applications  Full Text
AUTHORS: McLaughlin, AJ; Bonar, JR; Jubber, MG; Marques, PVS ; Hicks, SE; Wilkinson, CDW; Aitchison, JS;
PUBLISHED: 1997, SOURCE: Proceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO in Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, VOLUME: 11
INDEXED IN: Scopus
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