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TITLE: Mechanical characterization of reactively magnetron-sputtered TiN films  Full Text
AUTHORS: Vaz, F ; Machado, P; Rebouta, L ; Cerqueira, P; Goudeau, P; Riviere, JP; Alves, E ; Pischow, K; de Rijk, J;
PUBLISHED: 2003, SOURCE: 8th International Conference on Plasma Surface Engineering in SURFACE & COATINGS TECHNOLOGY, VOLUME: 174
INDEXED IN: Scopus WOS CrossRef
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