Carla Preciosa Braga Cerqueira
AuthID: R-001-JZP
11
TITLE: Mechanical characterization of reactively magnetron-sputtered TiN films Full Text
AUTHORS: Vaz, F ; Machado, P; Rebouta, L ; Cerqueira, P; Goudeau, P; Riviere, JP; Alves, E ; Pischow, K; de Rijk, J;
PUBLISHED: 2003, SOURCE: 8th International Conference on Plasma Surface Engineering in SURFACE & COATINGS TECHNOLOGY, VOLUME: 174
AUTHORS: Vaz, F ; Machado, P; Rebouta, L ; Cerqueira, P; Goudeau, P; Riviere, JP; Alves, E ; Pischow, K; de Rijk, J;
PUBLISHED: 2003, SOURCE: 8th International Conference on Plasma Surface Engineering in SURFACE & COATINGS TECHNOLOGY, VOLUME: 174