Publicações

AuthID
P-00Y-QX7

Author(s)

Adame, CF

Delaup, Y

Neupert, H

Himmerlich, M

Pfeiffer, S

Rimoldi, M

Taborelli, M

Document Type

Article

Year published

2023

Published

in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101

Volume: 41, Issue: 4

Indexing

Wos^®

Scopus^®

Google Scholar^®

Publication Identifiers

DOI: 10.1116/6.0002759

Scopus: 2-s2.0-85163747241

Wos: WOS:001031341000001

Source Identifiers

ISSN: 0734-2101

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