Insight on the Su-8 Resist as Passivation Layer for Transparent Ga2O3-In2O3-Zno Thin-Film Transistors

AuthID
 P-003-2VC
8
Author(s)
Vila, A
·
Tipo de Documento
Article
Year published
2010
Publicado
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 108, Número: 6, Páginas: 064505 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-77957740514
Wos: WOS:000282646400158
Source Identifiers
ISSN: 0021-8979
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