Role of the Rf Frequency on the Structure and Composition of Polymorphous Silicon Films

AuthID
 P-000-9YH
6
Author(s)
Raniero, L
·
Tipo de Documento
Article
Year published
2004
Publicado
in JOURNAL OF NON-CRYSTALLINE SOLIDS, ISSN: 0022-3093
Volume: 338, Número: 1 SPEC. ISS., Páginas: 183-187 (5)
Conference
20Th International Conference on Amorphous and Microcrystalline Semiconductors, Date: AUG 25-29, 2003, Location: Campos do Jordao, BRAZIL
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Publication Identifiers
SCOPUS: 2-s2.0-2942588869
Wos: WOS:000222219000039
Source Identifiers
ISSN: 0022-3093
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