High-Order Modes of Thin Film Amorphous Silicon Coupled Disk Resonator Arrays

AuthID
 P-00Z-7DV
5
Author(s)
Pestana, TG
·
Chu, VRN
·
Conde, JP
Document Type
Article in Press
Year published
2023
Published
in JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, ISSN: 1057-7157
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Publication Identifiers
Wos: WOS:001078177100001
Source Identifiers
ISSN: 1057-7157
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