Nanoindentation and Nanoscratch Behaviour of Reactive Sputtered Deposited W-S-C Film

AuthID
P-003-EE6
5
Author(s)
Koch, T
·
Roy, M
·
Document Type
Article
Year published
2009
Published
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 518, Issue: 1, Pages: 185-193 (9)
Indexing
Publication Identifiers
Scopus: 2-s2.0-69549128078
Wos: WOS:000270628800032
Source Identifiers
ISSN: 0040-6090
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