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Squeezed Film Damping Measurements on a Parallel-Plate Mems in the Free Molecule Regime
AuthID
P-003-HWP
4
Author(s)
Mol, L
·
Rocha, LA
·
Cretu, E
·
Wolffenbuttel, RF
Document Type
Article
Year published
2009
Published
in
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
ISSN: 0960-1317
Volume: 19, Issue: 7, Pages: 074021 (6)
Conference
19Th Micromechanics Europe Workshop,
Date:
SEP 28-30, 2008,
Location:
Aachen, GERMANY,
Host:
RWTH Aachen Univ
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Metadata
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Publication Identifiers
DOI
:
10.1088/0960-1317/19/7/074021
Scopus
: 2-s2.0-68249137263
Wos
: WOS:000267516800022
Source Identifiers
ISSN
: 0960-1317
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