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Room-Temperature Cosputtered Hfo2-Al2O3 Multicomponent Gate Dielectrics
AuthID
P-003-PRH
9
Author(s)
Pei, ZL
·
Pereira, L
·
Goncalves, G
·
Barquinha, P
·
Franco, N
·
Alves, E
·
Rego, AMB
·
Martins, R
·
Fortunato, E
Document Type
Article
Year published
2009
Published
in
ELECTROCHEMICAL AND SOLID STATE LETTERS,
ISSN: 1099-0062
Volume: 12, Issue: 10, Pages: G65-G68 (4)
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®
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Metadata
Sources
Publication Identifiers
DOI
:
10.1149/1.3186643
Scopus
: 2-s2.0-68949163562
Wos
: WOS:000268962800011
Source Identifiers
ISSN
: 1099-0062
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