A Simple Model for the Deposition of W-O Coatings by Reactive Gas Pulsing Process

AuthID
 P-003-WFQ
4
Author(s)
Document Type
Article
Year published
2008
Published
in EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, ISSN: 1286-0042
Volume: 43, Issue: 3, Pages: 321-325 (5)
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Publication Identifiers
Scopus: 2-s2.0-50849138550
Wos: WOS:000258652300010
Source Identifiers
ISSN: 1286-0042
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