Read-Out Calibration of a Soi Capacitive Transducer Using the Pull-In Voltage

AuthID
 P-003-Z24
4
Author(s)
Mol, L
·
Tipo de Documento
Article
Year published
2008
Publicado
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 18, Número: 6, Páginas: 064009 (6)
Conference
18Th European Workshop on Micromechanics (Mme 07), Date: SEP 16-18, 2007, Location: Guimaraes, PORTUGAL, Host: Univ Minho
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Publication Identifiers
SCOPUS: 2-s2.0-57249090775
Wos: WOS:000256619600010
Source Identifiers
ISSN: 0960-1317
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