Lithography Optimization With Artificial Intelligence for Thin Film Device Fabrication

AuthID
 P-018-3CW
5
Author(s)
Brites, G
·
Araujo, PDR
·
Tipo de Documento
Article
Year published
2025
Publicado
in IEEE TRANSACTIONS ON MAGNETICS, ISSN: 0018-9464
Volume: 61, Número: 6, Páginas: 1-1 (4)
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Publication Identifiers
SCOPUS: 2-s2.0-85216621563
Wos: WOS:001499319000020
Source Identifiers
ISSN: 0018-9464
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