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Non-Aqueous Routes to Metal Oxide Thin Films by Atomic Layer Deposition
AuthID
P-004-2GV
5
Author(s)
Rauwel, E
·
Clavel, G
·
Willinger, MG
·
Rawel, P
·
Pinna, N
Document Type
Article
Year published
2008
Published
in
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION,
ISSN: 1433-7851
Volume: 47, Issue: 19, Pages: 3592-3595 (4)
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Publication Identifiers
DOI
:
10.1002/anie.200705550
Pubmed
: 18381608
Scopus
: 2-s2.0-51049088249
Wos
: WOS:000255530100023
Source Identifiers
ISSN
: 1433-7851
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