Publicações

AuthID
P-018-SJS

Author(s)

Andrade, VD

Lopes, SM

Raimundo, RA

Alves, RF

Araújo, AJM

Vieira, PS

da Silva, FF

Moralesh, MA

Macedo, DA

Souza, GD

Tipo de Documento

Article

Year published

2025

Publicado

in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001

Volume: 195, Páginas: 109643 (8)

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Publication Identifiers

DOI: 10.1016/j.mssp.2025.109643

SCOPUS: 2-s2.0-105003911627

Wos: WOS:001486846700001

Source Identifiers

ISSN: 1369-8001

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