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Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates
AuthID
P-000-D82
3
Author(s)
Gaspar, J
·
Chu, V
·
Conde, JP
5
Editor(s)
LaVan, DA; Ayon, AA; Madou, MJ; McNie, ME; Prasad, SV
Document Type
Proceedings Paper
Year published
2004
Published
in
MICRO- AND NANOSYSTEMS
in
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS,
ISSN: 0272-9172
Volume: 782, Pages: 229-234 (6)
Conference
Symposium on Micro- and Nanosystems Held at the 2003 Mrs Fall Meeting,
Date:
DEC 01-03, 2003,
Location:
Boston, MA,
Sponsors:
Mat Res Soc
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: WOS:000222177500034
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ISSN
: 0272-9172
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