Dual Dc Magnetron Cathode Co-Deposition of (Al,Ti) and (Al,Ti,N) Thin Films with Controlled Depth Composition

AuthID
 P-004-84W
8
Author(s)
Document Type
Article
Year published
2007
Published
in VACUUM, ISSN: 0042-207X
Volume: 81, Issue: 11-12, Pages: 1503-1506 (4)
Conference
6Th Iberian Vacuum Meeting/4Th European Topical Conference on Hard Coating, Date: JUN 26-28, 2006, Location: Salamanca, SPAIN, Sponsors: Spanish & Portuguese Vacuum Soc
Indexing
Wos®
Scopus®
Crossref®4
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-34547873897
Wos: WOS:000249849800022
Source Identifiers
ISSN: 0042-207X
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