Ion Implantation and Ion Beam Analysis of Mod Deposited Oxide Films

AuthID
 P-004-8MA
7
Author(s)
Talagala, P
·
Sahana, MB
·
Naik, R
·
Padmanabhan, KR
·
Tipo de Documento
Article
Year published
2007
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 261, Número: 1-2, Páginas: 456-460 (5)
Conference
19Th International Conference on Application of Accelerators in Research and Industry, Date: AUG 20-25, 2006, Location: Ft Worth, TX, Patrocinadores: Lawrence Berkeley Natl Lab, Lawrence Livemore Natl Lab, Los Alamos Natl Lab, Natl Canc Inst, Oak Ridge Associated Univ, Oak Ridge Natl Lab, Sandia Natl Lab, Univ N Texas, AccSys Technol Inc, Comecer SRL, Natl Electrostat Corp, Synergy Vacuum
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Publication Identifiers
SCOPUS: 2-s2.0-34447279077
Wos: WOS:000248784100111
Source Identifiers
ISSN: 0168-583X
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