Reactive Sputtering of Tioxny Coatings by the Reactive Gas Pulsing Process. Part I: Pattern and Period of Pulses

AuthID
 P-004-9A6
8
Author(s)
Lintymer, J
·
Gavoille, J
·
Sthal, F
·
·
Document Type
Article
Year published
2007
Published
in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972
Volume: 201, Issue: 18, Pages: 7720-7726 (7)
Indexing
Wos®
Scopus®
Crossref®
Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-34249340143
Wos: WOS:000248604800016
Source Identifiers
ISSN: 0257-8972
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