Resonance of Electrostatically Actuated Thin-Film Amorphous Silicon Microelectromechanical Systems Microresonators in Aqueous Solutions: Effect of Solution Conductivity and Viscosity

AuthID
 P-004-AB0
3
Author(s)
·
Document Type
Article
Year published
2007
Published
in JOURNAL OF APPLIED PHYSICS, ISSN: 0021-8979
Volume: 101, Issue: 9, Pages: 094308 (5)
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Publication Identifiers
Scopus: 2-s2.0-34248575309
Wos: WOS:000246567900087
Source Identifiers
ISSN: 0021-8979
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