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Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
AuthID
P-004-B26
7
Author(s)
Kubart, T
·
Polcar, T
·
Kappertz, O
·
Parreira, N
·
Nyberg, T
·
Berg, S
·
Cavaleiro, A
Document Type
Article
Year published
2007
Published
in
PLASMA PROCESSES AND POLYMERS,
ISSN: 1612-8850
Volume: 4, Issue: SUPPL.1, Pages: S522-S526 (5)
Indexing
Wos
®
Scopus
®
Crossref
®
8
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Metadata
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Publication Identifiers
DOI
:
10.1002/ppap.200731301
Scopus
: 2-s2.0-51349168910
Wos
: WOS:000207735200100
Source Identifiers
ISSN
: 1612-8850
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