Surface Micromachining of a Thin Film Microresonator Using Dry Decomposition of a Polymer Sacrificial Layer

AuthID
 P-004-BK1
3
Author(s)
·
Document Type
Article
Year published
2007
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN: 1071-1023
Volume: 25, Issue: 2, Pages: 455-458 (4)
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Publication Identifiers
Scopus: 2-s2.0-34047147023
Wos: WOS:000246045300028
Source Identifiers
ISSN: 1071-1023
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