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Atomic Force Microscope Characterization of Pah/Pazo Multilayers
AuthID
P-004-BKQ
P-004-BKQ
6
Author(s)
Tipo de Documento
Article
Year published
2007
Publicado
in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317
Volume: 84, Número: 3, Páginas: 506-511 (6)
Conference
Symposium on Nanoscale Imaging and Metrology of Devices and Innovative Materials Held at the 2006 Emrs Spring Meeting, Date: MAY 29-JUN 02, 2006, Location: Nice, FRANCE, Patrocinadores: European Mat Res Soc
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ISSN: 0167-9317
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