Room Temperature Synthesis of Porous Sio2 Thin Films by Plasma Enhanced Chemical Vapor Deposition

AuthID
 P-005-4RC
5
Author(s)
Barranco, A
·
Cotrino, J
·
Espinos, JP
·
Gonzalez Elipe, AR
Tipo de Documento
Article
Year published
2004
Publicado
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 22, Número: 4, Páginas: 1275-1284 (10)
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Publication Identifiers
Wos: WOS:000223322000030
Source Identifiers
ISSN: 0734-2101
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