Current-Pressure-Voltage Characteristics in a Planar Magnetron Discharge

AuthID
P-000-HM7
5
Author(s)
Escrivao, ML
·
Teixeira, CMR
·
Maneira, MJP
Document Type
Article
Year published
2003
Published
in JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, ISSN: 0734-2101
Volume: 21, Issue: 2, Pages: 375-380 (6)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0037351386
Wos: WOS:000182598300006
Source Identifiers
ISSN: 0734-2101
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