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Current-Pressure-Voltage Characteristics in a Planar Magnetron Discharge
AuthID
P-000-HM7
5
Author(s)
Escrivao, ML
·
Pereira, PJS
·
Cabral, MH
·
Teixeira, CMR
·
Maneira, MJP
Document Type
Article
Year published
2003
Published
in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
ISSN: 0734-2101
Volume: 21, Issue: 2, Pages: 375-380 (6)
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Wos
®
Scopus
®
Google Scholar
®
Metadata
Sources
Publication Identifiers
DOI
:
10.1116/1.1539083
Scopus
: 2-s2.0-0037351386
Wos
: WOS:000182598300006
Source Identifiers
ISSN
: 0734-2101
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