Study of Roughness in Ti0.4Al0.6N/Mo Multilayer Structures

AuthID
 P-000-PY3
6
Author(s)
Pacaud, J
·
Riviere, JP
Document Type
Article
Year published
2002
Published
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 188, Issue: 1-4, Pages: 90-95 (6)
Conference
7Th European Conference on Accelerators in Applied Research and Technology, Date: AUG 21-24, 2001, Location: GUILDFORD, ENGLAND, Host: UNIV SURREY
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Publication Identifiers
Scopus: 2-s2.0-0036534950
Wos: WOS:000175364300015
Source Identifiers
ISSN: 0168-583X
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