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Role of Ion Bombardment on the Properties of A-Si : H Films
AuthID
P-007-9PN
3
Author(s)
Aguas, H
·
Martins, R
·
Fortunato, E
Document Type
Article
Year published
2000
Published
in
Vacuum,
ISSN: 0042-207X
Volume: 60, Issue: 1-2, Pages: 247-254
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Scopus
®
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Scopus
: 2-s2.0-0035157422
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ISSN
: 0042-207X
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