Searching for the Influence of the Sapphire Nitridation Conditions on Gan Films Grown by Cyclic Pld

AuthID
P-007-ATR
1
Editor(s)
Wetzel C.Yu E.T.Speck J.S.Rizzi A.Arakawa Y.
Document Type
Proceedings Paper
Year published
2002
Published
in Materials Research Society Symposium - Proceedings, ISSN: 0272-9172
Volume: 743, Pages: 61-66
Conference
Gan and Related Alloys - 2002, Date: 2 December 2002 through 6 December 2002, Location: Boston, MA
Indexing
Publication Identifiers
Scopus: 2-s2.0-0038455624
Source Identifiers
ISSN: 0272-9172
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