The Effect of Substrate Temperature on Physical and Electrical Properties of Dc Magnetron Sputtered (Ta2O5)(0.85)(Tio2)(0.15) Films

AuthID
 P-008-3YP
5
Author(s)
Elangovan, E
Tipo de Documento
Proceedings Paper
Year published
2012
Publicado
in E-MRS 2011 FALL SYMPOSIUM I: ADVANCES IN TRANSPARENT ELECTRONICS, FROM MATERIALS TO DEVICES III in IOP Conference Series-Materials Science and Engineering, ISSN: 1757-8981
Volume: 34, Número: 1, Páginas: 012009 (6)
Conference
Symposium I on Advances in Transparent Electronics, from Materials to Devices Iii/Fall Meeting of the European-Materials-Research-Society (E-Mrs), Date: SEP 19-23, 2011, Location: Warsaw, POLAND, Patrocinadores: European Mat Res Soc (E-MRS)
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Publication Identifiers
SCOPUS: 2-s2.0-84861316135
Wos: WOS:000306116700009
Source Identifiers
ISSN: 1757-8981
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