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Measuring and Interpreting the Mechanical-Thermal Noise Spectrum in a Mems
AuthID
P-008-PDK
3
Author(s)
Rocha, LA
·
Cretu, E
·
Wolffenbuttel, RF
Document Type
Article
Year published
2005
Published
in
JOURNAL OF MICROMECHANICS AND MICROENGINEERING,
ISSN: 0960-1317
Volume: 15, Issue: 7, Pages: S30-S38 (9)
Conference
15Th European Workshop on Micromechanics,
Date:
SEP 05-07, 2004,
Location:
Leuven, BELGIUM
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®
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Publication Identifiers
DOI
:
10.1088/0960-1317/15/7/005
Scopus
: 2-s2.0-21044442528
Wos
: WOS:000230714900006
Source Identifiers
ISSN
: 0960-1317
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