Pre-Distorted Sinewave-Driven Parallel-Plate Electrostatic Actuator for Harmonic Displacement

AuthID
 P-008-PDN
5
Author(s)
Mol, L
·
Tipo de Documento
Article
Year published
2005
Publicado
in JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN: 0960-1317
Volume: 15, Número: 7, Páginas: S103-S108 (6)
Conference
15Th European Workshop on Micromechanics, Date: SEP 05-07, 2004, Location: Leuven, BELGIUM
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Publication Identifiers
SCOPUS: 2-s2.0-21044459254
Wos: WOS:000230714900016
Source Identifiers
ISSN: 0960-1317
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