Publicações

Characterization of Pzt Thin Films for Micromotors

AuthID
P-008-RTT

Author(s)

Muralt, P

Kholkin, A

Kohli, M

Maeder, T

Setter, N

Document Type

Article

Year published

1995

Published

in MICROELECTRONIC ENGINEERING, ISSN: 0167-9317

Volume: 29, Issue: 1-4, Pages: 67-70 (4)

Conference

1St European Meeting on Integrated Ferroelectrics (Emif 1), at the 8Th European Meeting on Ferroelectrics (Emf 8), Date: JUL 03-05, 1995, Location: NIJMEGEN, NETHERLANDS, Sponsors: European Commiss, GEC Marconi, Philips Res, Siemens, Thomson CSF, Univ Nijmegen Univ, Fac Sci, Host: UNIV NIJMEGEN, FAC SCI

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