Fabrication And Characterization Of Pzt Thin-Film Vibrators For Micromotors

AuthID
 P-008-RTY
7
Author(s)
MURALT, P
·
KOHLI, M
·
MAEDER, T
·
BROOKS, K
·
SETTER, N
·
LUTHIER, R
Tipo de Documento
Article
Year published
1995
Publicado
in SENSORS AND ACTUATORS A-PHYSICAL, ISSN: 0924-4247
Volume: 48, Número: 2, Páginas: 157-165 (9)
Indexing
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Publication Identifiers
SCOPUS: 2-s2.0-0029304253
Wos: WOS:A1995RY44600009
Source Identifiers
ISSN: 0924-4247
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