Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

AuthID
P-008-RV1
7
Author(s)
DAMJANOVIC, D
·
BROOKS, KG
·
KOHLI, M
·
MAEDER, T
·
MURALT, P
·
SETTER, N
5
Editor(s)
George, EP; Takahashi, S; TrolierMcKinstry, S; Uchino, K; WunFogle, M
Document Type
Proceedings Paper
Year published
1995
Published
in MATERIALS FOR SMART SYSTEMS in MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, ISSN: 0272-9172
Volume: 360, Pages: 429-434 (6)
Conference
Symposium on Materials for Smart Systems, at the 1994 Materials-Research-Society Fall Meeting, Date: NOV 28-30, 1994, Location: BOSTON, MA, Sponsors: MAT RES SOC
Indexing
Publication Identifiers
Scopus: 2-s2.0-0029232687
Wos: WOS:A1995BC82P00057
Source Identifiers
ISSN: 0272-9172
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