Influence of Sputtering Pressure on the Structure and Properties of Zro2 Films Prepared by Rf Reactive Sputtering

AuthID
 P-000-W2T
5
Author(s)
Gao, PT
·
Document Type
Article
Year published
2001
Published
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 173, Issue: 1-2, Pages: 84-90 (7)
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Publication Identifiers
Scopus: 2-s2.0-0034830422
Wos: WOS:000167345800012
Source Identifiers
ISSN: 0169-4332
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