Role of Ion Bombardment and Plasma Impedance on the Performances Presented by Undoped A-Si : H Films

AuthID
P-000-WD0
6
Author(s)
Tipo de Documento
Article
Year published
2001
Publicado
in THIN SOLID FILMS, ISSN: 0040-6090
Volume: 383, Número: 1-2, Páginas: 165-168 (4)
Conference
3Rd Symposium O on Thin Film Materials for Large Area Electronics of the E-Mrs 2000 Spring Meeting, Date: MAY 30-JUN 02, 2000, Location: STRASBOURG, FRANCE, Patrocinadores: French Minist Res, Balzers AG, Unaxis, Jobin Yvon
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0035246781
Wos: WOS:000167378300040
Source Identifiers
ISSN: 0040-6090
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