Fast and Cheap Method to Qualitatively Measure the Thickness and Uniformity of Zro2 Thin Films

AuthID
 P-000-WJ6
4
Author(s)
Marques, A
·
Tipo de Documento
Article
Year published
2001
Publicado
in MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, ISSN: 1369-8001
Volume: 4, Número: 1-3, Páginas: 319-321 (3)
Conference
Spring Meeting of the European-Materials-Research-Society, Date: MAY 29-JUN 02, 2000, Location: STRASBOURG, FRANCE, Patrocinadores: European Mat Res Soc
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Publication Identifiers
SCOPUS: 2-s2.0-0035247528
Wos: WOS:000167727200074
Source Identifiers
ISSN: 1369-8001
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