Publicações

Thin Films' Residual Stress Measurement by Optical Profilometry

AuthID
P-000-WPR

Author(s)

Costa, MFM

Editor(s)

Asundi, AK; Osten, W; Varadan, VK

Document Type

Proceedings Paper

Year published

2001

Published

in ADVANCED PHOTONIC SENSORS AND APPLICATIONS II in PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE), ISSN: 0277-786X

Volume: 4596, Pages: 1-8 (8)

Conference

Advanced Photonic Sensors and Applications Ii Conference, Date: NOV 27-30, 2001, Location: SINGAPORE, SINGAPORE, Sponsors: SPIE, Nanyang Tech Univ

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Scopus^®

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Metadata
Sources

Publication Identifiers

DOI: 10.1117/12.447335

Scopus: 2-s2.0-0035771071

Wos: WOS:000174470600001

Source Identifiers

ISSN: 0277-786X

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