Publicações

Sub-Micron Gap A-Si:h Thin Film Lamé-Mode Resonator Processed at Low Temperature on a Glass Substrate

AuthID
P-009-3A4

Author(s)

Gualdino, A

Gaspar, J

Chu, V

Conde, JP

Document Type

Proceedings Paper

Year published

2013

Published

in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Pages: 1484-1487

Conference

2013 17Th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013, Date: 16 June 2013 through 20 June 2013, Location: Barcelona

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