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Hard Nanocomposite Ti-Si-N Coatings Prepared by Dc Reactive Magnetron Sputtering

AuthID
P-000-YP7

Author(s)

Rebouta, L

Tavares, CJ

Aimo, R

Wang, Z

Pischow, K

Alves, E

Rojas, TC

Odriozola, JA

Document Type

Article

Year published

2000

Published

in SURFACE & COATINGS TECHNOLOGY, ISSN: 0257-8972

Volume: 133, Pages: 234-239 (6)

Conference

27Th International Conference on Metallurgical Coatings and Thin Films, Date: APR 10-14, 2000, Location: SAN DIEGO, CALIFORNIA, Sponsors: Amer Vacuum Soc, Adv Surface Engn Div

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Publication Identifiers

DOI: 10.1016/s0257-8972(00)00934-8

Scopus: 2-s2.0-0034310535

Wos: WOS:000165887500037

Source Identifiers

ISSN: 0257-8972

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Hard Nanocomposite Ti-Si-N Coatings Prepared by Dc Reactive Magnetron Sputtering

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