Optimized Su-8 Processing for Low-Cost Microstructures Fabrication Without Cleanroom Facilities

AuthID
 P-009-X0Q
4
Author(s)
Document Type
Article
Year published
2014
Published
in MICROMACHINES, ISSN: 2072-666X
Volume: 5, Issue: 3, Pages: 738-755 (18)
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Wos®
Scopus®
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Google Scholar®
Publication Identifiers
Scopus: 2-s2.0-84987791217
Wos: WOS:000343094500025
Source Identifiers
ISSN: 2072-666X
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